HUANG, Rui. Research on Photolithography Technology and Photoresist Materials in Chip Manufacturing. Transactions on Computer Science and Intelligent Systems Research, [S. l.], v. 10, p. 39–48, 2025. DOI: 10.62051/msyd5c27. Disponível em: https://wepub.org/index.php/TCSISR/article/view/5636. Acesso em: 16 apr. 2026.