ZHANG, Heyi. Research and Applications of EUV Lithography in Silicon Photonics. Transactions on Computer Science and Intelligent Systems Research, [S. l.], v. 10, p. 26–31, 2025. DOI: 10.62051/9j6m2m55. Disponível em: https://wepub.org/index.php/TCSISR/article/view/5634. Acesso em: 2 may. 2026.