Research Status of Diamond-Like Carbon Coatings
DOI:
https://doi.org/10.62051/ijmee.v8n2.01Keywords:
Diamond-like Carbon (DLC) Coatings, Preparation Technology, Performance OptimizationAbstract
Diamond-like Carbon (DLC) coatings are amorphous carbon-based thin films composed of randomly mixed sp¹, sp², and sp³ hybridized carbon. They combine the high hardness of diamond and the low friction property of graphite, with performance regulated by the sp³/sp² ratio. Widely used in fields such as mechanical processing, they can address key issues in tool surface modification. This paper reviews its research status: in terms of structure, it includes two core models and two categories (a-C:H, a-C); preparation focuses on PVD (including HiPIMS) and CVD (PE-CVD); aiming at common issues like high internal stress, it summarizes optimization methods such as element doping, which requires balancing stress and hardness. The paper concludes with an outlook on the development trends of preparation technologies and application prospects in tools, providing a reference for industrial optimization.
References
[1] Lv Bolin, et al. Research Progress on Graphite's Tribological Properties, Lubrication Mechanism and Modification. Materials Report 29.19 (2015): 60-66.
[2] Jacob W, Möller W. On the structure of thin hydrocarbon films[J]. Applied Physics Letters, 1993, 63(13): 1771-1773.
[3] Angus J C, Jansen F. Dense ‘‘diamondlike’’hydrocarbons as random covalent networks[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1988, 6(3): 1778-1782.
[4] Robertson, J. Mechanical properties and coordinations of amorphous carbons[J]. Physical review letters, 1992,68(2): 220-223.
[5] Gao T, Li C, Wang Y, et al. Carbon fiber reinforced polymer in drilling: From damage mechanisms to suppression[J]. Composite Structures, 2022, 286: 115232.
[6] Grigoriev S N, Volosova M A, Fedorov S V, et al. The effectiveness of diamond-like carbon aC: H: Si coatings in increasing the cutting capability of radius End mills when machining heat-resistant nickel alloys[J]. Coatings, 2022, 12(2): 206.
[7] Erdemir A, Fontaine J, Donnet C. An overview of superlubricity in diamond-like carbon films[J]. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications, 2008: 237-262.
[8] Zhu Guo. Multi-scale Simulation and Experimental Research on Physical Processes Related to Magnetron Sputtering Coating [D]. Wuhan: Huazhong University of Science and Technology, 2019.
[9] Wang Qimin, Zhang Xiaobo, Zhang Shihong, et al. Research Progress on Deposition of Hard Coatings by High-Power Pulse Magnetron Sputtering Technology [J]. Journal of Guangdong University of Technology, 2013, 30(4): 1-13.
[10] Wang L, Jin J, Zhu C, et al. Effects of HiPIMS pulse-length on plasma discharge and on the properties of WC-DLC coatings[J]. Applied surface science, 2019, 487: 526-538.
[11] Guo C Q, Li H Q, Peng Y L, et al. Residual stress and tribological behavior of hydrogen-free Al-DLC films prepared by HiPIMS under different bias voltages[J]. Surface and Coatings Technology, 2022, 445: 128713.
[12] Vetter J. 60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications[J]. Surface and Coatings Technology, 2014, 257: 213-240.
[13] Witke T, Schuelke T, Schultrich B, et al. Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods[J]. Surface and coatings technology, 2000, 126(1): 81-88.
[14] Han Liang, Zhang Tao, Liu Delian. Process Optimization Study on the Deposition of Tetrahedral Amorphous Carbon Films with High Sp3 Bond Content by Magnetic Filtration Cathode Arc Technology [J]. Journal of Vacuum Science and Technology, 2013 (3): 203-207.
[15] Wang M, Zhang L, Lin G. Improved mechanical and tribological properties of diamond-like carbon films by adjusting pulsed substrate bias[J]. Diamond and Related Materials, 2022, 130: 109402.
[16] Huang B, Liu L, Han S, et al. Effect of deposition temperature on the microstructure and tribological properties of Si-DLC coatings prepared by PECVD[J]. Diamond and Related Materials, 2022, 129: 109345.
[17] Xiong Wenwen, He Song, Zheng Songsheng, et al. Preparation of diamond-like carbon films by RF-PECVD method [J]. Journal of Materials Research, 2021, 35(2): 154-160.
[18] Xu Shipeng, Zhan Faqi, Zheng Yuehong, et al. Preparation and structure and mechanical properties of hydrogen-containing tetrahedral amorphous carbon films [J]. Journal of the Chinese Ceramic Society, 2022, 50(10): 2651-2656.
[19] Grigoriev S, Volosova M, Fyodorov S, et al. DLC-coating application to improve the durability of ceramic tools[J]. Journal of Materials Engineering and Performance, 2019, 28(7): 4415-4426.
[20] Zhang Ting, He Juan, Ren Ying, et al. Research Progress on Residual Stress of Diamond-like Carbon Films [J]. Materials Report, 2016, 30(1): 84-87, 95.
[21] Chen, Y, Mei F, Lin X, et al.The effect of carbon doping on microstructure, mechanical properties, wear resistance and cutting performance of AlTiCN coating[J]. Thin Solid Films 713 (2020): 138344.
[22] Sun De'en, Dong Hongming, Sam Zhang, et al. Review on the Reduction of Internal Stress in Doped Diamond Carbon Films [J]. Surface Technology, 2018, 47(06): 95-103.
[23] Robertson J. Deposition mechanisms for promoting sp3 bonding in diamond-like carbon[J]. Diamond and related materials, 1993, 2(5-7): 984-989.
[24] He X M, Walter K C, Nastasi M, et al. Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2000, 18(5): 2143-2148.
[25] Sharifahmadian, Omid, and Farzad Mahboubi. "A comparative study of microstructural and tribological properties of N-DLC/DLC double layer and single layer coatings deposited by DC-pulsed PACVD process." Ceramics International 45.6 (2019): 7736-7742.
[26] Zhou Y, Ma W, Geng J, et al. Exploring long-run reciprocating Wear of diamond-like carbon coatings: Microstructural, morphological and tribological evolution[J]. Surface and Coatings Technology, 2021, 405: 126581.
[27] Nakazawa, Hideki, et al. "Tribological properties and thermal stability of hydrogenated, silicon/nitrogen-coincorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition." Japanese Journal of Applied Physics 55.12 (2016): 125501.
[28] Voevodin A A, Schneider J M, Rebholz C, et al. Multilayer composite ceramicmetal-DLC coatings for sliding wear applications[J]. Tribology international, 1996, 29(7): 559-570.
[29] Zhou Qiong, Huang Biao, Zhang Ergeng, et al. Research Status on Preparation of DLC Coatings and Measures for Improving Internal Stress and Thermal Stability [J]. Chinese Journal of Ceramics, 2019, 40(5): 555-564.
[30] Kumar C S, Majumder H, Khan A, et al. Applicability of DLC and WC/C low friction coatings on Al2O3/TiCN mixed ceramic cutting tools for dry machining of hardened 52100 steel[J]. Ceramics International, 2020, 46(8): 11889-11897.
[31] Wang Y, Xu J, Zhang J, et al. Tribochemical reactions and graphitization of diamond-like carbon against alumina give volcano-type temperature dependence of friction coefficients: A tight-binding quantum chemical molecular dynamics simulation[J]. Carbon, 2018, 133: 350-357.
[32] Xu W, Zhou K S, Lin S, et al. Structural properties of hydrogenated Al-doped diamond-like carbon films fabricated by a hybrid plasma system[J]. Diamond and related materials, 2018, 87: 177-185.
[33] Santiago J A, Fernández-Martínez I, Sánchez-López J C, et al. Tribomechanical properties of hard Cr-doped DLC coatings deposited by low-frequency HiPIMS[J]. Surface and Coatings Technology, 2020, 382: 124899.
[34] He X M, Walter K C, Nastasi M, et al. Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2000, 18(5): 2143-2148.
[35] Er K H. Thermal stability of reactive sputtered silicon-doped diamond-like carbon films[J]. Journal of Ceramic Processing Research, 2013, 14(1): 134-138.
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